vertical lpcvd
低溫LPCVDSiGe;100至1200°C以上退火制程.LPCVD服務的市場:.MEMS·先進封裝·功率半導體·光電·半導體.AVP/RVP.TheAVP/RVPverticalbatchfurnace ...,ThisthesisanalyzestheflowandthermalfieldinaverticalLPCVDchamberwithrotatingsusceptorbyusingDSMCmethod.Itaimsat...
vertical lpcvd reactor
- lp cvd
- usg半導體
- CVD tungsten
- lpcvd nitride
- Low temperature oxide
- lpcvd原理
- CVD Precursor
- LPCVD furnace system
- poly爐管
- LPCVD SiO2
- ndl水平爐管
- 半導體active area
- CVD wiki
- Oxide deposition
- W CVD process
- What is lpcvd
- Asm lpcvd
- Plasma Enhanced chemical vapor deposition
- Low pressure chemical vapor deposition
- poly摻雜
- Asm oxide
- LPCVD advantages
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- lpcvd ndl
- PECVD silicon nitride step coverage
VERTICALLPCVDREACTOR.Inthisreactoratlowpressure,borondopedpolysiliconisdepositedondifferentsubstrates.(Si,Diamond,Glass...)usingtheLPCVD ...
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